Optimization of parameters for generating nitrogen plasma in plasma-assisted MOCVD growth of InGaN thin films
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چکیده
منابع مشابه
Characterization of Nanosized Al2O3 Powder Synthesized by Thermal-Assisted MOCVD and Plasma-Assisted MOCVD
Nanosized Al2O3 powder is synthesized by thermal Metal Organic Chemical Vapor Deposition (MOCVD)combined withplasma. The effects of reaction temperature, pressure, Al(CH3)3 (TMA) concentration and...
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متن کاملcharacterization of nanosized al2o3 powder synthesized by thermal-assisted mocvd and plasma-assisted mocvd
nanosized al2o3 powder is synthesized by thermal metal organic chemical vapor deposition (mocvd)combined withplasma. the effects of reaction temperature, pressure, al(ch3)3 (tma) concentration and reactant gases (co2 and o2) on the characteristics of the synthesized al2o3 powders are investigated. the experimental results demonstrate that very fineal2o3 powders with mean particle size of about ...
متن کاملMOCVD growth of non-epitaxial and epitaxial ZnS thin films
Thin films of ZnS have been deposited by MOCVD on both BaTa206/ITO/glass and Si substrates. Diethylzinc (DEZn) and H2S are used for deposition on substrates heated to the 250-400°C temperature range. The microstructure and properties of ZnS films were studied by X-ray diffractometry (XRD), ultraviolet/visible spectrophotometry (UVS) and scanning electron microscopy (SEM). Films prepared on BaTa...
متن کاملRelaxing the Conductivity/Transparency Trade-Off in MOCVD ZnO Thin Films by Hydrogen Plasma
Increasing the conductivity of polycrystalline zinc oxide fi lms without impacting the transparency is a key aspect in the race to fi nd affordable and high quality material as replacement of indium-containing oxides. Usually, ZnO fi lm conductivity is provided by a high doping and electron concentration, detrimental to transparency, because of free carrier absorption. Here we show that hydroge...
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2019
ISSN: 2158-3226
DOI: 10.1063/1.5126943